Publication:

Growth and Characterisation of Atomic Layer Deposited Ultra-Thin WNxCy Films

Date

2006-06
Dissertation
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department57ab5f84-1173-4408-9bb5-e8d0c70b3e98
cris.virtualsource.orcid57ab5f84-1173-4408-9bb5-e8d0c70b3e98
dc.contributor.advisorMaex, Karen
dc.contributor.advisorCelis, Jean-Pierre
dc.contributor.authorMartin Hoyas, Ana
dc.date.accessioned2026-04-29T11:52:56Z
dc.date.available2026-04-29T11:52:56Z
dc.date.issued2006-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59229
dc.language.isoen
dc.provenance.editstepusermeghan.oneill@imec.be
dc.title

Growth and Characterisation of Atomic Layer Deposited Ultra-Thin WNxCy Films

dc.typePHD thesis
dspace.entity.typePublication
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