3D-carrier profiling in FinFETs using scanning spreading resistance microscopy

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Author(s)

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Zschaetzsch, Gerd

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Koelling, Sebastian

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De Keersgieter, An

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Kambham, Ajay Kumar

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Drijbooms, Chris

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Schulze, Andreas

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Chiarella, Thomas

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Horiguchi, Naoto

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Hoffmann, Thomas

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Vandervorst, Wilfried

Metrics

1975 since deposited on 2021-10-19

Acq. date: 2025-10-23