Publication:

Dopant profiling in Ge

Date

2003
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGeenen, Luc
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorSatta, Alessandra
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-15T07:28:46Z
dc.date.available2021-10-15T07:28:46Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8329
dc.source.beginpage163
dc.source.conferenceInternational Conference on Secondary Ion Mass Spectrometry - SIMS XIV
dc.source.conferencedate14/09/2003
dc.source.conferencelocationSan Diego, CA USA
dc.title

Dopant profiling in Ge

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions