Publication:

On the electrical activity of extended defects in high-mobility channel materials

Date

2015
Proceedings Paper
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorEneman, Geert
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorGupta, Somya
dc.contributor.authorMerckling, Clement
dc.contributor.authorAlian, AliReza
dc.contributor.authorSchulze, Andreas
dc.contributor.authorCaymax, Matty
dc.contributor.authorLanger, Robert
dc.contributor.authorBarla, Kathy
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorAlian, AliReza
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorBarla, Kathy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.date.accessioned2021-10-22T22:54:45Z
dc.date.available2021-10-22T22:54:45Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25911
dc.identifier.urlhttp://ecst.ecsdl.org/content/69/10/119.short
dc.source.beginpage119
dc.source.conferenceULSI Process Integration 9
dc.source.conferencedate11/10/2015
dc.source.conferencelocationPhoenix, AZ USA
dc.source.endpage130
dc.title

On the electrical activity of extended defects in high-mobility channel materials

dc.typeProceedings paper
dspace.entity.typePublication
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