Publication:
Thickness dependent residual stress in polycrystalline aluminum nitride thin films
Date
| dc.contributor.author | Pobedinskas, P. | |
| dc.contributor.author | Mortet, Vincent | |
| dc.contributor.author | Haenen, Ken | |
| dc.contributor.imecauthor | Haenen, Ken | |
| dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
| dc.date.accessioned | 2021-10-18T01:46:27Z | |
| dc.date.available | 2021-10-18T01:46:27Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16029 | |
| dc.source.conference | Innovations in Thin Film Processing and Characterisation - ITFPC | |
| dc.source.conferencedate | 17/11/2009 | |
| dc.source.conferencelocation | Nancy France | |
| dc.title | Thickness dependent residual stress in polycrystalline aluminum nitride thin films | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |