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Conference contributions
Packaging for MEMS and MST devices: the indent reflow sealing method
Publication:
Packaging for MEMS and MST devices: the indent reflow sealing method
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Date
2000
Proceedings Paper
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4795.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tilmans, Harrie
;
Van De Peer, Myriam
;
Beyne, Eric
Journal
Abstract
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2104
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-16
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Metrics
Views
2104
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-16
Citations