Publication:

A dedicated loading instrument for characterization and testing of MEMS

Date

2005-10
Proceedings Paper
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Author(s)

Kalicinski, Stanislaw
;
Sabuncuoglu Tezcan, Deniz  
;
De Moor, Piet  
;
De Vries, Atze-Cees
;
Van Hoof, Chris  
;
Wevers, Martine
;
De Wolf, Ingrid  

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