Publication:
Porogen residue free ultra low-k PECVD material: fabrication, optical and mechanical properties
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1798 since deposited on 2021-10-18
1last month
Acq. date: 2026-03-17
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Statistics
Views
1798 since deposited on 2021-10-18
1last month
Acq. date: 2026-03-17
Citations