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Evaluation of a new advanced low-k material
Publication:
Evaluation of a new advanced low-k material
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Smirnov, Evgeny
;
Vanstreels, Kris
;
Verdonck, Patrick
;
Ciofi, Ivan
;
Shamiryan, Denis
;
Baklanov, Mikhaïl
;
Phillips, Mark
Journal
Japanese Journal of Applied Physics
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1929
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1929
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-12
Citations