Publication:

Hyper-NA imaging using two-beam interference

Date

2005
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHendrickx, Eric
dc.contributor.authorVan Look, Lieve
dc.contributor.authorVersluijs, Janko
dc.contributor.authorRonse, Kurt
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-16T01:59:57Z
dc.date.available2021-10-16T01:59:57Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10571
dc.source.conference2nd International Symposium on Immersion Lithography
dc.source.conferencedate12/09/2005
dc.source.conferencelocationBrugge Belgium
dc.title

Hyper-NA imaging using two-beam interference

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions