Publication:

Printability and propagation of stochastic defects through a study o defects programmed on EUV mask

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2602034
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 994.63 KB

Author(s)

Das, Poulomi  
;
Moussa, Alain  
;
Beral, Christophe  
;
Gupta, Mihir  
;
Saib, Mohamed  
;
Halder, Sandip  
;
Charley, Anne-Laure  
;
Leray, Philippe  

Journal

na

Abstract

Description

Metrics

Downloads

409 since deposited on 2023-06-20
74last month
26last week
Acq. date: 2025-12-17

Views

1137 since deposited on 2023-06-20
1last month
Acq. date: 2025-12-17

Citations

Metrics

Downloads

409 since deposited on 2023-06-20
74last month
26last week
Acq. date: 2025-12-17

Views

1137 since deposited on 2023-06-20
1last month
Acq. date: 2025-12-17

Citations