Publication:

Challenges with respect to high-k/metal gate stack etching and cleaning

Date

2007
Proceedings Paper
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Author(s)

Vos, Rita  
;
Arnauts, Sophia  
;
Bovie, Inge
;
Onsia, Bart  
;
Garaud, Sylvain
;
Xu, Kaidong
;
Yu, HongYu
;
Kubicek, Stefan  
;
Rohr, Erika
;
Schram, Tom  
;
Veloso, Anabela  
;
Conard, Thierry  
;
Leunissen, Peter
;
Mertens, Paul  

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1986 since deposited on 2021-10-16
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