Publication:
A spectroscopic ellipsometry study of ultra thin amorphous silicon layers deposited on crystalline silicon by PECVD
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1950 since deposited on 2021-10-20
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Acq. date: 2026-01-25
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1950 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-01-25
Citations