Publication:
A spectroscopic ellipsometry study of ultra thin amorphous silicon layers deposited on crystalline silicon by PECVD
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1955 since deposited on 2021-10-20
4last month
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Acq. date: 2026-03-16
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Statistics
Views
1955 since deposited on 2021-10-20
4last month
2last week
Acq. date: 2026-03-16
Citations