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Conference contributions
Etch challenges in high aspect ratio aupervia patterning
Publication:
Etch challenges in high aspect ratio aupervia patterning
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Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Puliyalil, Harinarayanan
;
Feurprier, Yannick
;
Briggs, Basoene
;
Lazzarino, Frederic
;
Wilson, Chris
;
Kumar, Kaushik
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1955
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Acq. date: 2026-01-27
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Views
1955
since deposited on 2021-10-27
1
last month
1
last week
Acq. date: 2026-01-27
Citations