Publication:

Etch challenges in high aspect ratio aupervia patterning

Date

2019

Proceedings Paper

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Author(s)

Puliyalil, Harinarayanan

;

Feurprier, Yannick

;

Briggs, Basoene

;

Lazzarino, Frederic

;

;

Metrics

1953 since deposited on 2021-10-27

Acq. date: 2025-12-13