Publication:

Some challenges for mask making to keep up with the roadmap

Date

1998
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorJonckheere, Rik
dc.contributor.authorRandall, John
dc.contributor.authorMarschner, Thomas
dc.contributor.authorRonse, Kurt
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.accessioned2021-09-30T12:18:06Z
dc.date.available2021-09-30T12:18:06Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2658
dc.source.conference15th European Conference on Mask Making Technology for Integrated Circuits and Micro-Components; 16-17 November 1998; Munchen, G
dc.source.conferencelocation
dc.title

Some challenges for mask making to keep up with the roadmap

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations