Publication:

Effective contact resistivity reduction for Mo/Pd/n-In0.53Ga0.47As contact

Date

2019
Journal article
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dc.contributor.authorZhang, Jian
dc.contributor.authorWang, Linlin
dc.contributor.authorYu, Hao
dc.contributor.authorMerckling, Clement
dc.contributor.authorMols, Yves
dc.contributor.authorVais, Abhitosh
dc.contributor.authorRamesh, Siva
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorSchaekers, Marc
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorMocuta, Dan
dc.contributor.authorCollaert, Nadine
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorJiang, Yulong
dc.contributor.imecauthorZhang, Jian
dc.contributor.imecauthorYu, Hao
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMols, Yves
dc.contributor.imecauthorVais, Abhitosh
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecYu, Hao::0000-0002-1976-0259
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecVais, Abhitosh::0000-0002-0317-7720
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-28T00:38:25Z
dc.date.available2021-10-28T00:38:25Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34531
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8851065
dc.source.beginpage1800
dc.source.endpage1803
dc.source.issue11
dc.source.journalIEEE Electron Device Letters
dc.source.volume40
dc.title

Effective contact resistivity reduction for Mo/Pd/n-In0.53Ga0.47As contact

dc.typeJournal article
dspace.entity.typePublication
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