Publication:
Anisotropic etching of silicon in a two-component alkaline solution
Date
| dc.contributor.author | Vazsonyi, E. | |
| dc.contributor.author | Vertesy, Z. | |
| dc.contributor.author | Toth, A. | |
| dc.contributor.author | Szlufcik, Jozef | |
| dc.contributor.imecauthor | Szlufcik, Jozef | |
| dc.date.accessioned | 2021-10-15T07:35:06Z | |
| dc.date.available | 2021-10-15T07:35:06Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8352 | |
| dc.source.beginpage | 165 | |
| dc.source.endpage | 169 | |
| dc.source.issue | 2 | |
| dc.source.journal | Journal of Micromechanics and Microengineering | |
| dc.source.volume | 13 | |
| dc.title | Anisotropic etching of silicon in a two-component alkaline solution | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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