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Analog performance of SOI FinFETs with different TiN gate electrode thickness
Publication:
Analog performance of SOI FinFETs with different TiN gate electrode thickness
Date
2010
Proceedings Paper
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21494.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Galeti, M.
;
Rodrigues, M.
;
Collaert, Nadine
;
Simoen, Eddy
;
Claeys, Cor
;
Martino, J.A.
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Abstract
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1895
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1895
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations