Publication:

Si passivation for high-k gate dielectrics on GE MOSFETs: further developments and understanding

Date

2009
Meeting abstract
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dc.contributor.authorCaymax, Matty
dc.contributor.authorMitard, Jerome
dc.contributor.authorMartens, Koen
dc.contributor.authorYang, Lijun
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMeuris, Marc
dc.contributor.authorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-17T21:32:20Z
dc.date.available2021-10-17T21:32:20Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15074
dc.source.beginpage27
dc.source.conferenceJoint American Vacuum Society (AVS) - Taiwan Annual Physical Society Meeting on "Beyond Si CMOS"
dc.source.conferencedate20/01/2009
dc.source.conferencelocationChanghua Taiwan
dc.title

Si passivation for high-k gate dielectrics on GE MOSFETs: further developments and understanding

dc.typeMeeting abstract
dspace.entity.typePublication
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