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Efficient Mapping and Tracking the Properties of Micromechanical Resonators Using Phase-Lock Loops with Closely-Spaced Frequencies

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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-2733-1366
cris.virtualsource.departmente9440138-0c07-4a44-85d4-fb8acd42c10b
cris.virtualsource.orcide9440138-0c07-4a44-85d4-fb8acd42c10b
dc.contributor.authorZinth, Agnes
dc.contributor.authorHouri, Samer
dc.contributor.authorPoot, Menno
dc.date.accessioned2026-06-04T09:59:34Z
dc.date.available2026-06-04T09:59:34Z
dc.date.createdwos2026-03-07
dc.date.issued2026
dc.description.abstractStudying the dynamical behavior of micro- and nano-mechanical systems (MEMSs and NEMSs) is essential in various fields from nonlinear dynamics to quantum technologies. Hence, it is important to precisely monitor the mechanical properties of MEMS and NEMS devices. In this work, we show how to track and spatially map various properties of a mechanical resonator, such as frequency shift, linewidth, and nonlinearity, by appropriately selecting three closely spaced drive frequencies and using phase-locked loops. This technique tracks changes in the system quickly and efficiently, without the need for repeated frequency sweeps of the oscillator response, simply by employing three phase-locked tones.
dc.description.wosFundingTextFunded by the German Research Foundation (DFG) under Germany's Excellence Strategy, EXC-2111-390814868, and TUM-IAS, funded by the German Excellence Initiative and the European Union Seventh Framework Programme under grant agreement 291763.
dc.identifier.doi10.3390/mi17020213
dc.identifier.issn2072-666X
dc.identifier.pmidMEDLINE:41753870
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59560
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherMDPI
dc.source.beginpage213
dc.source.issue2
dc.source.journalMICROMACHINES
dc.source.numberofpages20
dc.source.volume17
dc.title

Efficient Mapping and Tracking the Properties of Micromechanical Resonators Using Phase-Lock Loops with Closely-Spaced Frequencies

dc.typeJournal article
dspace.entity.typePublication
imec.internal.crawledAt2026-04-07
imec.internal.sourcecrawler
imec.internal.wosCreatedAt2026-04-07
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