Publication:
Wet etching of heavily doped Si in HF: a mechanistic study
Date
| dc.contributor.author | Valckx, Nick | |
| dc.date.accessioned | 2021-10-18T22:41:14Z | |
| dc.date.available | 2021-10-18T22:41:14Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18131 | |
| dc.source.conference | KNCV Electrochemical Symposium | |
| dc.source.conferencedate | 26/11/2010 | |
| dc.source.conferencelocation | Eindhoven Netherlands | |
| dc.title | Wet etching of heavily doped Si in HF: a mechanistic study | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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