Publication:
Advanced ULSI applications: dilute HCl and SC1
Date
| dc.contributor.author | Hurd, Trace | |
| dc.date.accessioned | 2021-09-29T13:07:29Z | |
| dc.date.available | 2021-09-29T13:07:29Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/680 | |
| dc.source.beginpage | 69 | |
| dc.source.conference | Proceedings of SEMICON/West 1995 Technical Seminar: Cleaning Technology for the Submicron Era | |
| dc.source.conferencedate | 11/07/1995 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | 74 | |
| dc.title | Advanced ULSI applications: dilute HCl and SC1 | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |