Publication:

Evaluation of high-speed linear air-knife based wafer dryer

Date

2013

Proceedings Paper

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Files

28103.pdf 152.1 KB

Author(s)

Tamaddon, Amir-Hossein

;

Belmiloud, Naser

;

;

Struyf, Herbert

;

;

Statistics

1951 since deposited on 2021-10-21

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Acq. date: 2026-06-06