Publication:

Novel approach to conformal FINFET extension doping

Date

2011
Proceedings Paper
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dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorHautala, Y.
dc.contributor.authorShao, Y.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2021-10-19T22:33:56Z
dc.date.available2021-10-19T22:33:56Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20235
dc.source.beginpage23
dc.source.conferenceIon Implantation Technology 2010. 18th International Conference
dc.source.conferencedate6/06/2010
dc.source.conferencelocationKyoto Japan
dc.title

Novel approach to conformal FINFET extension doping

dc.typeProceedings paper
dspace.entity.typePublication
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