Publication:
Improvement of EUV Contact Hole Pattern Rectification using Novel Directed Self-Assembly Materials
| dc.contributor.author | Kim, Dong-Ook | |
| dc.contributor.author | Kim, Jihoon | |
| dc.contributor.author | Kang, Namgoo | |
| dc.contributor.author | Her, Youngjun | |
| dc.contributor.author | Miyazaki, Shinji | |
| dc.contributor.author | Alperson, Boaz | |
| dc.contributor.imecauthor | Her, Youngjun | |
| dc.date.accessioned | 2025-07-31T03:59:32Z | |
| dc.date.available | 2025-07-31T03:59:32Z | |
| dc.date.issued | 2025 | |
| dc.identifier.doi | 10.1117/12.3051492 | |
| dc.identifier.eisbn | 978-1-5106-8641-0 | |
| dc.identifier.isbn | 978-1-5106-8640-3 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45976 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.conference | 2025 Conference on Novel Patterning Technologies | |
| dc.source.conferencedate | FEB 24-27, 2025 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.numberofpages | 7 | |
| dc.source.volume | 13427 | |
| dc.title | Improvement of EUV Contact Hole Pattern Rectification using Novel Directed Self-Assembly Materials | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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