Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Process-induced positive charges in Hf-based gate stacks
Publication:
Process-induced positive charges in Hf-based gate stacks
Copy permalink
Date
2008
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
16760.pdf
1.04 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, C.Z.
;
Zhang, J.F.
;
Chang, M.H.
;
Peaker, A.R.
;
Hall, S.
;
Groeseneken, Guido
;
Pantisano, Luigi
;
De Gendt, Stefan
;
Heyns, Marc
Journal
Journal of Applied Physics
Abstract
Description
Metrics
Views
1983
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1983
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations