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Process-induced positive charges in Hf-based gate stacks
Publication:
Process-induced positive charges in Hf-based gate stacks
Date
2008
Journal article
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16760.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, C.Z.
;
Zhang, J.F.
;
Chang, M.H.
;
Peaker, A.R.
;
Hall, S.
;
Groeseneken, Guido
;
Pantisano, Luigi
;
De Gendt, Stefan
;
Heyns, Marc
Journal
Journal of Applied Physics
Abstract
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1980
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations
Metrics
Views
1980
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations