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Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications
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Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications
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Date
2007
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Thomas, Reji
;
Ehrhart, Peter
;
Roeckerath, Martin
;
Van Elshocht, Sven
;
Rije, Eduard
;
Luysberg, Martina
;
Boese, Markus
;
Schubert, Jürgen
;
Caymax, Matty
;
Waser, Rainer
Journal
Journal of the Electrochemical Society
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1921
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Acq. date: 2025-12-10
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Metrics
Views
1921
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-10
Citations