Publication:
Intra-die temperature non uniformity related to front side emissivity depandence during rapid thermal annealing
Date
| dc.contributor.author | Laviron, C. | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Michallet, A. | |
| dc.contributor.author | Halimaoui, A. | |
| dc.contributor.author | Granneman, E. | |
| dc.date.accessioned | 2021-10-15T05:20:05Z | |
| dc.date.available | 2021-10-15T05:20:05Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7786 | |
| dc.source.beginpage | 3 | |
| dc.source.conference | Advanced Short-Time Thermal Processing for Si-Based CMOS Devices | |
| dc.source.conferencedate | 28/04/2003 | |
| dc.source.conferencelocation | Paris France | |
| dc.source.endpage | 10 | |
| dc.title | Intra-die temperature non uniformity related to front side emissivity depandence during rapid thermal annealing | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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