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The influence of solvents on the quality of SAMs for low-k pore sealing purpose
Publication:
The influence of solvents on the quality of SAMs for low-k pore sealing purpose
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Date
2016
Meeting abstract
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33692.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sun, Yiting
;
de Roover, Roel
;
Struyf, Herbert
;
De Feyter, Steven
;
Armini, Silvia
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Abstract
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1872
since deposited on 2021-10-23
Acq. date: 2025-12-15
Citations
Metrics
Views
1872
since deposited on 2021-10-23
Acq. date: 2025-12-15
Citations