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On the TEM assessment of local strain distributions in integrated circuit structures
Publication:
On the TEM assessment of local strain distributions in integrated circuit structures
Date
1994
Proceedings Paper
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418.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Armigliato, A.
;
Frabboni, S.
;
Balboni, R.
;
Janssens, Koenraad
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Abstract
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2044
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2044
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations