Publication:

Aspects of metal etching for interconnect technologies

Date

1994
Proceedings Paper
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dc.contributor.authorVerdonck, P.
dc.contributor.authorMeynen, Herman
dc.date.accessioned2021-09-29T12:54:54Z
dc.date.available2021-09-29T12:54:54Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/486
dc.source.conference3rd Brazilian Microelectronics School: Advanced Metallization for VLSI/ULSI Applications
dc.source.conferencedate16/05/1994
dc.source.conferencelocationCampinas Brazil
dc.title

Aspects of metal etching for interconnect technologies

dc.typeProceedings paper
dspace.entity.typePublication
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