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Manufacturability issues for application of silicides in 0.25 μm CMOS process and beyond
Publication:
Manufacturability issues for application of silicides in 0.25 μm CMOS process and beyond
Date
1996
Proceedings Paper
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1623.pdf
971.75 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Qingfeng
;
Lauwers, Anne
;
Jonckx, Franky
;
de Potter de ten Broeck, Muriel
;
Chen, Chun-Cho
;
Maex, Karen
Journal
Abstract
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2
since deposited on 2021-09-29
Acq. date: 2025-10-23
Views
1961
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Downloads
2
since deposited on 2021-09-29
Acq. date: 2025-10-23
Views
1961
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations