Publication:
Process developments for 3D-IC integration
Date
| dc.contributor.author | La Manna, Antonio | |
| dc.contributor.imecauthor | La Manna, Antonio | |
| dc.date.accessioned | 2021-10-22T02:47:40Z | |
| dc.date.available | 2021-10-22T02:47:40Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24089 | |
| dc.source.conference | SEMICON Europa | |
| dc.source.conferencedate | 7/10/2014 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.title | Process developments for 3D-IC integration | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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