A Comprehensive Study of Nanosheet and Forksheet SRAM for Beyond N5 Node

dc.contributor.author	Gupta, Mohit
dc.contributor.author	Weckx, Pieter
dc.contributor.author	Schuddinck, Pieter
dc.contributor.author	Jang, Doyoung
dc.contributor.author	Chehab, Bilal
dc.contributor.author	Cosemans, Stefan
dc.contributor.author	Ryckaert, Julien
dc.contributor.author	Dehaene, Wim
dc.contributor.imecauthor	Gupta, Mohit
dc.contributor.imecauthor	Weckx, Pieter
dc.contributor.imecauthor	Schuddinck, Pieter
dc.contributor.imecauthor	Jang, Doyoung
dc.contributor.imecauthor	Chehab, Bilal
dc.contributor.imecauthor	Cosemans, Stefan
dc.contributor.imecauthor	Ryckaert, Julien
dc.contributor.imecauthor	Dehaene, Wim
dc.contributor.orcidimec	Schuddinck, Pieter::0000-0003-1893-3135
dc.contributor.orcidimec	Gupta, Mohit::0000-0002-1924-1264
dc.date.accessioned	2022-11-17T16:08:51Z
dc.date.available	2021-11-02T15:58:44Z
dc.date.available	2022-11-17T16:08:51Z
dc.date.issued	2021
dc.identifier.doi	10.1109/TED.2021.3088392
dc.identifier.issn	0018-9383
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/37713
dc.publisher	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage	3819
dc.source.endpage	3825
dc.source.issue	8
dc.source.journal	IEEE TRANSACTIONS ON ELECTRON DEVICES
dc.source.numberofpages	7
dc.source.volume	68
dc.title	A Comprehensive Study of Nanosheet and Forksheet SRAM for Beyond N5 Node
dc.type	Journal article
dspace.entity.type	Publication
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