Publication:

Dopant profiling in semiconductors with SIMS

Date

2012
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dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-20T18:00:44Z
dc.date.available2021-10-20T18:00:44Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21738
dc.source.conference14th Topical Conference on Quantitative Surface Analysis
dc.source.conferencedate28/10/2012
dc.source.conferencelocationTampa, FL USA
dc.title

Dopant profiling in semiconductors with SIMS

dc.typeOral presentation
dspace.entity.typePublication
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