Publication:
The formation of Pd seeded copper layer on TiN substrates by electroless deposition
Date
| dc.contributor.author | Min, Woo Sig | |
| dc.contributor.author | Lantasov, Yuri | |
| dc.contributor.author | Palmans, Roger | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Lee, D. N. | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-01T08:30:43Z | |
| dc.date.available | 2021-10-01T08:30:43Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2771 | |
| dc.source.conference | Advanced Metallization Conference; 6-8 Oct. 1998; Colorado Springs, USA. | |
| dc.source.conferencelocation | ||
| dc.title | The formation of Pd seeded copper layer on TiN substrates by electroless deposition | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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