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A five layer thin film MCM-Si design using oxynitride dielectrics
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A five layer thin film MCM-Si design using oxynitride dielectrics
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Date
1997
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lernout, Jo
;
Vanfleteren, Jan
;
Van Calster, Andre
;
Schols, G.
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1934
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-15
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Metrics
Views
1934
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-15
Citations