Publication:
Determining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopy
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Simons, Veerle | |
| dc.contributor.author | Srinivasan, Ashwyn | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Simons, Veerle | |
| dc.contributor.imecauthor | Srinivasan, Ashwyn | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.contributor.orcidimec | Simons, Veerle::0000-0001-5714-955X | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-25T17:53:46Z | |
| dc.date.available | 2021-10-25T17:53:46Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30567 | |
| dc.identifier.url | http://ma.ecsdl.org/content/MA2018-02/31/1070.short | |
| dc.source.beginpage | 1070 | |
| dc.source.conference | 2018 AiMES ECS International Meeting | |
| dc.source.conferencedate | 30/09/2018 | |
| dc.source.conferencelocation | Cancun Mexico | |
| dc.title | Determining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopy | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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