Publication:

Plasma Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2S and H2 plasma

Date

2016

Meeting abstract

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Author(s)

Groven, Benjamin

;

;

Meersschaut, Johan

;

Nuytten, Thomas

;

;

Richard, Olivier

;

Conard, Thierry

;

Verdonck, Patrick

;

Van Elshocht, Sven

;

;

;

;

Delabie, Annelies

Metrics

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Acq. date: 2025-12-15