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Investigation of sealing efficiency of self-assembled monolayers deposited on porous k=2.0 dielectrics as a function of dielectric surface preparation by plasma
Publication:
Investigation of sealing efficiency of self-assembled monolayers deposited on porous k=2.0 dielectrics as a function of dielectric surface preparation by plasma
Date
2013
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sun, Yiting
;
Armini, Silvia
;
Baklanov, Mikhaïl
;
De Feyter, Steven
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Abstract
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1924
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
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Views
1924
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations