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Investigation of sealing efficiency of self-assembled monolayers deposited on porous k=2.0 dielectrics as a function of dielectric surface preparation by plasma

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1925 since deposited on 2021-10-21
Acq. date: 2025-12-09

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1925 since deposited on 2021-10-21
Acq. date: 2025-12-09

Citations