Publication:

Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETs

Date

2023
Journal article
https://doi.org/10.3390/mi14081514
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dc.contributor.authorTyaginov, Stanislav
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorRawal, Yaksh
dc.contributor.authorChiarella, Thomas
dc.contributor.authorToledo de Carvalho Cavalcante, Camila
dc.contributor.authorKimura, Yosuke
dc.contributor.authorVandemaele, Michiel
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorMitard, Jerome
dc.contributor.authorVadakupudhu Palayam, Senthil
dc.contributor.authorReifsnider, Jason
dc.contributor.authorKaczer, Ben
dc.contributor.imecauthorTyaginov, Stanislav
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorRawal, Yaksh
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorKimura, Yosuke
dc.contributor.imecauthorVandemaele, Michiel
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorReifsnider, Jason
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorToledo de Carvalho Cavalcante, Camila
dc.contributor.imecauthorVadakupudhu Palayam, Senthil
dc.contributor.orcidimecTyaginov, Stanislav::0000-0002-5348-2096
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecKimura, Yosuke::0000-0002-9098-0414
dc.contributor.orcidimecVandemaele, Michiel::0000-0003-0740-4115
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecReifsnider, Jason::0000-0002-4248-4037
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecVadakupudhu Palayam, Senthil::0000-0002-0855-3377
dc.date.accessioned2023-12-12T08:14:37Z
dc.date.available2023-09-15T17:43:59Z
dc.date.available2023-12-12T08:14:37Z
dc.date.embargo2023-07-28
dc.date.issued2023
dc.identifier.doi10.3390/mi14081514
dc.identifier.issn2072-666X
dc.identifier.pmidMEDLINE:37630050
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42546
dc.publisherMDPI
dc.source.beginpageArt. 1514
dc.source.endpagena
dc.source.issue8
dc.source.journalMICROMACHINES
dc.source.numberofpages23
dc.source.volume14
dc.subject.keywordsHOT-CARRIER DEGRADATION
dc.subject.keywordsULTRA-THIN OXIDES
dc.subject.keywordsWEAR-OUT
dc.subject.keywordsNBTI
dc.subject.keywordsFLUCTUATIONS
dc.subject.keywordsSILICON
dc.subject.keywordsVARIABILITY
dc.subject.keywordsDIELECTRICS
dc.subject.keywordsTRANSISTORS
dc.subject.keywordsGENERATION
dc.title

Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETs

dc.typeJournal article
dspace.entity.typePublication
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