Publication:

SIMS-profiling of Boron: fundamentals and practical applications

Date

2002
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorJanssens, Tom
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBrijs, Bert
dc.contributor.authorGeenen, Luc
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-14T21:54:03Z
dc.date.available2021-10-14T21:54:03Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6431
dc.source.conferenceIon Beam Analysis and Modification of Functional Surfaces and Layers
dc.source.conferencedate20/09/2002
dc.source.conferencelocationGroningen The Netherlands
dc.title

SIMS-profiling of Boron: fundamentals and practical applications

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations