Publication:

Experimental characterization of NTD rResist shrinkage

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2256568

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37084.pdf 770.87 KB

Author(s)

;

Mulders, Thomas

;

Taoka, Hironobu

;

;

Klostermann, Ulrich

;

;

Grozev, Grozdan

;

Masahiro, Yoshidome

;

Shirakawa, Michihiro

;

Metrics

1979 since deposited on 2021-10-24

Acq. date: 2025-12-11