Publication:
Material quality optimization of Si epitaxial wafers and process development on freestanding epitaxial Si substrates
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1860 since deposited on 2021-10-23
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Acq. date: 2026-08-04
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Statistics
Views
1860 since deposited on 2021-10-23
2last month
2last week
Acq. date: 2026-08-04
Citations