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Reliability: a possible showstopper for oxide thickness scaling?

Date

2000
Journal article
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dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.accessioned2021-10-14T12:51:44Z
dc.date.available2021-10-14T12:51:44Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4302
dc.source.beginpage436
dc.source.endpage444
dc.source.issue5
dc.source.journalSemiconductor Science and Technology
dc.source.volume15
dc.title

Reliability: a possible showstopper for oxide thickness scaling?

dc.typeJournal article
dspace.entity.typePublication
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