Publication:

Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications

Date

2015
Proceedings Paper
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Author(s)

Capogreco, Elena  
;
Degraeve, Robin  
;
Lisoni, Judit
;
Luong, Vu  
;
Arreghini, Antonio  
;
Toledano Luque, Maria
;
Hikavyy, Andriy  
;
Numata, Toshinori
;
De Meyer, Kristin  
;
Van den Bosch, Geert  
;
Van Houdt, Jan  

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