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Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications
Publication:
Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications
Date
2015
Proceedings Paper
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31432.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Capogreco, Elena
;
Degraeve, Robin
;
Lisoni, Judit
;
Luong, Vu
;
Arreghini, Antonio
;
Toledano Luque, Maria
;
Hikavyy, Andriy
;
Numata, Toshinori
;
De Meyer, Kristin
;
Van den Bosch, Geert
;
Van Houdt, Jan
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1893
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations
Metrics
Views
1893
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations