Publication:

Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications

Date

2015

Proceedings Paper

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Files

31432.pdf 1.26 MB

Author(s)

Capogreco, Elena

;

Degraeve, Robin

;

;

;

Arreghini, Antonio

;

Toledano Luque, Maria

;

Hikavyy, Andriy

;

Numata, Toshinori

;

De Meyer, Kristin

;

Van den Bosch, Geert

;

Statistics

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Acq. date: 2026-08-09