Publication:
Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications
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1910 since deposited on 2021-10-22
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Acq. date: 2026-07-18
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Statistics
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1910 since deposited on 2021-10-22
1last month
1last week
Acq. date: 2026-07-18
Citations