Publication:

Deposition, Characterization, and Performance of Spinel InGaZnO4

Date

2022-02-23
Journal article
https://doi.org/10.1021/acsaelm.1c01315
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dc.contributor.authorDekkers, Harold
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorSubhechha, Subhali
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorGlushkova, Anastasia
dc.contributor.authorDelhougne, Romain
dc.contributor.authorKar, Gouri Sankar
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorBelmonte, Attilio
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorSubhechha, Subhali
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorGlushkova, Anastasia
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidext0000-0003-4778-5709
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecGlushkova, Anastasia::0000-0001-7191-6217
dc.contributor.orcidimecSubhechha, Subhali::0000-0002-1960-5136
dc.date.accessioned2022-04-04T09:18:22Z
dc.date.available2022-04-01T16:38:44Z
dc.date.available2022-04-04T09:18:22Z
dc.date.embargo9999-12-31
dc.date.issued2022-02-23
dc.identifier.doi10.1021/acsaelm.1c01315
dc.identifier.issn2637-6113
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39564
dc.source.beginpage1238
dc.source.endpage1249
dc.source.issue3
dc.source.journalACS Applied Electronic Materials
dc.source.numberofpages12
dc.source.volume4
dc.subject.disciplineElectrical & electronic engineering
dc.subject.keywordsIn−Ga−Zn oxide (IGZO), Ga2ZnO4, spinel, c-axis-aligned crystalline (CAAC), field-effect mobility, bias stress stability.
dc.title

Deposition, Characterization, and Performance of Spinel InGaZnO4

dc.typeJournal article
dspace.entity.typePublication
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