Publication:

RC benefits of advanced metallization options

Date

2019
Journal article
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dc.contributor.authorCiofi, Ivan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorBaert, Rogier
dc.contributor.authorContino, Antonino
dc.contributor.authorGupta, Anshul
dc.contributor.authorCroes, Kristof
dc.contributor.authorWilson, Chris
dc.contributor.authorMocuta, Dan
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2021-10-27T08:04:02Z
dc.date.available2021-10-27T08:04:02Z
dc.date.issued2019
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32714
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8680758
dc.source.beginpage2339
dc.source.endpage2345
dc.source.issue5
dc.source.journalIEEE Transactions on Electron Devices
dc.source.volume66
dc.title

RC benefits of advanced metallization options

dc.typeJournal article
dspace.entity.typePublication
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