Publication:

SiGe MEMS technology: a platform technology enabling different demonstrators

Date

2010

Proceedings Paper

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Author(s)

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Haspeslagh, Luc

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De Coster, Jeroen

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Beernaert, Roel

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De Smet, Herbert

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Van Thourhout, Dries

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1896 since deposited on 2021-10-19

Acq. date: 2026-02-26