Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers
Publication:
(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers
Date
2004
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Pawlak, Bartek
;
Janssens, Tom
;
Brijs, Bert
;
Delhougne, Romain
;
Caymax, Matty
;
Loo, Roger
Journal
Abstract
Description
Metrics
Views
2043
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
2043
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations